Author:
Chen Simeng,Wu Zhengtao,Wang Qimin
Abstract
Alternating TiB2-dcMS and Cr-HiPIMS layers are used to fabricate TiB2/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB2 interlayer, forming a coherent TiB2/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.
Funder
National Key Research and Development Project of China
National Natural Science Foundation of China
Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials
Subject
Materials Chemistry,Chemistry (miscellaneous),Electronic, Optical and Magnetic Materials