Simulation, Fuzzy Analysis and Development of ZnO Nanostructure-based Piezoelectric MEMS Energy Harvester

Abstract

Fuzzy logic-based control systems are widely used in various fields like home appliances, medical instruments, automobiles, textile machinery, agriculture equipment and aviation for process control and data analysis. Fuzzy logic technique has shown great potential to solve the complex problems of physical world due to similarity with human understanding. Its advancements have gained widespread attention in different research areas. In several cases, it is very suitable for electronic devices which need to be precisely self-powered. In this work, an ANSYS-based simulation, fuzzy analysis, development and testing of a microelectromechanical system (MEMS)-based energy harvester have been presented. Zinc oxide (ZnO) nano rods were synthesized on an anodic aluminum oxide (AAO) template to form the MEMS energy harvester and study the effect of energy generation by applying force. The power of 5.16 nano Watts has been obtained by taking the numerical value of voltage (Voc) and current (Isc) as 3.16 mV and 0.985 µA respectively using fuzzy logic tool. Experimental testing of the harvester shows that the range of Voc is 3–6.4 mV and Isc is 0.45–1.5 μA. The results depict that this device can be used for touch screens to generate energy that can be further utilized for charging smart devices.