Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer

Abstract

Here, we investigate the actuation dynamics of a micro device with different intervening liquids between the actuating components under the influence of Casimir and dissipative hydrodynamic forces. This is enabled via phase space portraits, which demonstrate that by increasing the dielectric response of the intervening layer the autonomous device may not come into stiction due to the decreasing in magnitude Casmir force. Unlike the micro devices that are placed in vacuum with an intervening liquid, the phase portraits show only a spiral trajectory which eventually stops at a rest position due to the strong energy dissipation by the position dependent hydrodynamic drag forces, even when considering sufficiently strong restoring forces. Moreover, it is feasible to expand the area of motion using intervening liquids with lower dynamic viscosity or increasing the slip length of the intervening fluid. Finally, under the influence of an external driven force, which is the realistic case for possible applications, the system can reach stable oscillation at larger separations with an amplitude higher for the liquid that led to lower Casimir and hydrodynamic forces. Hence, the results presented in this study are essential for studying the dynamical behavior of MEMS and their design in liquid environments.