Development and Research Application of Optical Waveguide Microstructure Component Manufacturing Process for Triangle Roller Imprinting

Abstract

This research integrates the stable pressuring of the flat surface of roll-to-plate (R2P) imprinting, the fast production features of roll-to-roll (R2R) imprinting, and compound layer ring-type microstructure mold cavity manufacturing technology. Using the compound multilayer method with air molecule assistance, the stability of the roller imprinting process is enhanced. In addition, with precision modulation of the triangle roll-to-plate (TR2P) system, a stable microstructure roller imprinting manufacturing process is achieved. The experimental results indicate that the developed triangle roll-to-plate system can stabilize the imprinting process of the continuous microstructure array components. Also, by modulating the angles of the roller axis and the ring, the exterior features of the microstructure can also be adjusted. Gas-molecule-assisted continuous pressuring effectively elevated the roll imprinting angle and continuous pressuring time and reached a high replication rate of 99.14%. The optical waveguide microstructure component produced by this process and the average waveguide propagation losses of approximately 1.2~1.4 dB/cm show that it has optical stability and transparency after optical testing. The research proves that the manufacturing process can effectively provide an innovative process for the equipment and application of the microstructure component.