1. Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilova st. 38, Moscow 119991, Russia
2. Laser Physics Department, National Research Nuclear University MEPhI, Kashirskoe sh. 31, Moscow 115409, Russia
3. Federal State Budgetary Scientific Institution “Federal Scientific Agroengineering Center VIM”, 1st Institutsky Proezd 5, Moscow 109428, Russia
4. Institute of Biology and Biomedicine, Lobachevsky State University of Nizhny Novgorod, Gagarin av. 23, Nizhny Novgorod 603105, Russia