Impact of Imperfect Artefacts and the Modus Operandi on Uncertainty Quantification Using Virtual Instruments

Abstract

The usage of virtual instruments (VIs) to analyze measurements and calculate uncertainties is increasing. Well-known examples are virtual coordinate measurement machines (VCMMs) which are often used and even commercially offered to assess measurement uncertainties of CMMs. A more recent usage of the VI concept is posed by the modeling of scatterometers. These VIs can be used to assess the measurement uncertainty after the measurement has been performed based on the real measurement data or prior to the measurement to predict the measurement uncertainty using a type of simulated measurement data. The research question addressed in this paper is to assess if this predicted uncertainty will be similar in magnitude to the calculated uncertainty based on the measurement data. It turns out that this is not necessarily the case. The main observation of this paper was that the uncertainty predicted by a VI can be highly sensitive to the chosen way of operating the VI. To amend this situation, a simple procedure was proposed that can be used prior to performing the real measurement and that is believed to produce a conservative prediction of the measurement uncertainty in most cases. This was verified in a case study involving the measurement of the asphericity of an imperfect sphere using a CMM, with the uncertainty calculated by means of a VCMM.