A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/17/2/387/pdf
Reference27 articles.
1. Optimized design of a micromachined G-switch based on contactless configuration for health care applications
2. The design, simulation and fabrication of a novel horizontal sensitive inertial micro-switch with lowgvalue based on MEMS micromachining technology
3. Fabrication and packaging of inertia micro-switch using low-temperature photo-resist molded metal-electroplating technology
4. Triaxial inertial switch with multiple thresholds and resistive ladder readout
5. Microminiature ganged threshold accelerometers compatible with integrated circuit technology
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1. MEMS Switch Realities: Addressing Challenges and Pioneering Solutions;Micromachines;2024-04-23
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3. A novel MEMS inertial switch with frictional electrode;Journal of Micromechanics and Microengineering;2022-05-11
4. A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function;Journal of Microelectromechanical Systems;2022-02
5. Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios;Sensors;2022-01-29
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