Resonant Power Supply for Plasma Cleaning Based on Fuzzy Logic Power Tracking

Abstract

The coaxial cylindrical reactor with a rotary nozzle is proposed to be used as the plasma torch of the plasma cleaning machine. The phase-shifted full bridge series resonance circuit is used as the power circuit topology. Because the voltage source load resonance circuit technology is mature, the cycle and difficulty of research and development on this basis are relatively small, and the corresponding control strategy and algorithm are relatively easy to achieve. At the same time, the voltage source circuit is smaller than the current source circuit, in line with the development trend of plasma cleaning equipment. In this paper, based on the phase shift full bridge series resonant circuit, the control strategy is compared and analyzed. Considering the response speed, control precision and efficiency, a PSPWM-PFM (Phase Shift Pulse Width Modulation- Pulse Frequency Modulation) hybrid modulation control strategy is proposed, which makes the system not only have a fast response speed but can also construct a soft switch and has a high efficiency. A maximum power tracking algorithm based on a fuzzy PFM was proposed to solve the problem that the plasma power supply deviated from the resonant frequency point easily due to environmental perturbation, and thus deviated from the maximum power point.