Fast Extraction of Coupling of Modes Parameters for Surface Acoustic Wave Devices Using Finite Element Method Based Simulation

Abstract

The finite element method (FEM) has been applied to extract the coupling-of-modes (COM) parameters of surface acoustic wave (SAW) devices for a long time. It always involves calculating the dispersive curves or harmonic admittance, which makes the extraction process and results sophisticated, time-consuming and inaccurate. Therefore, a simple method is proposed to extract all COM parameters of the SAW devices rapidly and accurately in this paper. It is based on the FEM and combines the stationary analysis with modal analysis. We have described in detail the basic principles and procedures of the proposed method, and made a comprehensive comparison between the proposed method and the other two existing methods. We have also examined the proposed method by extracting COM parameters of some common SAW substrate, and compared our extracted results with those reported in the other literatures. Results show that our proposed method holds higher accuracy and more efficiency (~s order) than the others (~h order). Moreover, our extracted COM parameters are in an excellent agreement with those reported in the other literatures.