Fabrication of β-Ga2O3 Nanotubes via Sacrificial GaSb-Nanowire Templates

Author:

Shangguan Lei12,He Long-Bing12ORCID,Dong Sheng-Pan2,Gao Yu-Tian1,Sun Qian1,Zhu Jiong-Hao2,Hong Hua1ORCID,Zhu Chao1,Yang Zai-Xing34,Sun Li-Tao1

Affiliation:

1. SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China

2. SEU-AMTE Collaborative Center for Atomic Layer Deposition and Etching, Southeast University, Wuxi 214000, China

3. School of Physics, Shandong University, Jinan 250100, China

4. School of Microelectronics, Shandong University, Jinan 250100, China

Abstract

β-Ga2O3 nanostructures are attractive wide-band-gap semiconductor materials as they exhibit promising photoelectric properties and potential applications. Despite the extensive efforts on β-Ga2O3 nanowires, investigations into β-Ga2O3 nanotubes are rare since the tubular structures are hard to synthesize. In this paper, we report a facile method for fabricating β-Ga2O3 nanotubes using pre-synthesized GaSb nanowires as sacrificial templates. Through a two-step heating-treatment strategy, the GaSb nanowires are partially oxidized to form β-Ga2O3 shells, and then, the residual inner parts are removed subsequently in vacuum conditions, yielding delicate hollow β-Ga2O3 nanotubes. The length, diameter, and thickness of the nanotubes can be customized by using different GaSb nanowires and heating parameters. In situ transmission electron microscopic heating experiments are performed to reveal the transformation dynamics of the β-Ga2O3 nanotubes, while the Kirkendall effect and the sublimation process are found to be critical. Moreover, photoelectric tests are carried out on the obtained β-Ga2O3 nanotubes. A photoresponsivity of ~25.9 A/W and a detectivity of ~5.6 × 1011 Jones have been achieved with a single-β-Ga2O3-nanotube device under an excitation wavelength of 254 nm.

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

MDPI AG

Subject

General Materials Science,General Chemical Engineering

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