1. Department of Ultraclean Technology and Micromanufacturing, Fraunhofer Institute for Manufacturing Engineering and Automation IPA, Nobelstrasse 12, 70569 Stuttgart, Germany
2. Institute for Applied Materials (IAM-WK), Karlsruhe Institute of Technology (KIT), Hermann-von Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
3. AuE Kassel GmbH, Heinrich-Hertz-Str. 52, 34123 Kassel, Germany
4. Department of Machine Elements and Engineering Design (iaf), University of Kassel, Mönchebergstr. 7, 34125 Kassel, Germany