1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China
2. School of Information Engineering, Shanxi Vocational University of Engineering Science and Technology, Jinzhong 030619, China
3. School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China
4. Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China
5. Center for Microsystem Integration, North University of China, Taiyuan 030051, China
6. School of Semiconductors and Physics, North University of China, Taiyuan 030051, China
7. Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China