Tilt Sensor with Recalibration Feature Based on MEMS Accelerometer

Abstract

The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal and long-term drifts, imprecise factory calibration, and aging phenomena. In order to reduce these errors, a two-axial tilt sensor comprising a triaxial MEMS accelerometer, an aligning unit, and solid cubic housing was built. By means of the aligning unit it was possible to align the orientation of the accelerometer sensitive axes with respect to the housing with an accuracy of 0.03°. Owing to the housing, the sensor could be easily and quickly recalibrated, and thus errors such as thermal and long-term drifts as well as effects of aging were eliminated. Moreover, errors due to local and temporal variations of the gravitational acceleration can be compensated for. Procedures for calibrating and aligning the accelerometer are described. Values of thermal and long-term drifts of the tested sensor, resulting in tilt errors of even 0.4°, are presented. Application of the sensor for monitoring elevated loads is discussed.