Discharge Characteristics and Plasma Erosion of Various Dielectric Materials in the Dielectric Barrier Discharges

Abstract

The objective of this study is the investigation of dielectric barrier discharges (DBDs) with the solid plates and the flexible polymer films. A high capacitance with a high dielectric constant and a small thickness is responsible for the discharge of a high plasma current with a low operation voltage; here, the thin flexible polyimide film ensured a high capacitance, and is comparable to the thick solid-plate alumina. In the long-duration test of the dielectric-surface plasma erosion, the solid plates show a high resistance against the plasma erosions, while the polymer films are vulnerable to the etching by the plasma-species chemical reaction. The polymer-film surface, however, was reinforced remarkably against the plasma erosion by the silicone-paste coating.