Abstract
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
Funder
National Natural Science Foundation of China
111 Project Version 2.0
Fundamental Research Funds for the Central Universities
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
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