Investigation of Elastic Properties of Sc Doped AlN: A First principles and Experimental Approach-Reference-Cited by-同舟云学术

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Investigation of Elastic Properties of Sc Doped AlN: A First principles and Experimental Approach

Published:2023-12-20 Issue: Volume: Page:
ISSN:
Container-title:RAiSE-2023
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Author:

Rudresh Jyothilakshmi¹,Srihari N. V.¹,Kowshik Suhas²^ORCID,Sandeep ¹,Nagaraja K. K.¹^ORCID

Affiliation:

1. Alternate Energy Materials Laboratory, Department of Physics, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal 576 104, Karnataka, India

2. Department of Mechanical and Industrial Engineering, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal 576 104, Karnataka, India

Publisher

MDPI

Link

https://www.mdpi.com/2673-4591/59/1/86/pdf

Reference19 articles.

1. Five Topologies of Cantilever-Based MEMS Piezoelectric Vibration Energy Harvesters: A Numerical and Experimental Comparison;Jia;Microsyst. Technol.,2016

2. Influence of Sputtering Atmosphere on Crystal Quality and Electrical Properties of Zirconium Aluminum Nitride Thin Film;Ke;Surf. Coatings Technol.,2016

3. Improvement Mechanism of Sputtered AlN Films by High-Temperature Annealing;Xiao;J. Cryst. Growth,2018

4. A Comprehensive Review on Piezoelectric Energy Harvesting Technology: Materials, Mechanisms, and Applications;Liu;Appl. Phys. Rev.,2018

5. Nguyen, H.H., Van Minh, L., Oguchi, H., and Kuwano, H. (2018). Development of Highly Efficient Micro Energy Harvesters with MgHf-Codoped AlN Piezoelectric Films. Proc. IEEE Int. Conf. Micro Electro Mech. Syst., 222–225.

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