Abstract
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.
Funder
Guangdong Innovative and Entrepreneurial Research Team Program
National Natural Science Foundation of China
Ministry of Science and Technology of China
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
6 articles.
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