1. School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310058, China
2. Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi’an 710024, China
3. Qingdao Institute for Marine Technology of Tianjin University, Qingdao 266200, China
4. Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou 311121, China
5. School of Microelectronics, Tianjin University, Tianjin 300072, China