A Bi-Directional Acoustic Micropump Driven by Oscillating Sharp-Edge Structures

Abstract

This paper proposes a bi-directional acoustic micropump driven by two groups of oscillating sharp-edge structures: one group of sharp-edge structures with inclined angles of 60° and a width of 40 μm, and another group with inclined angles of 45° and a width of 25 μm. One of the groups of sharp-edge structures will vibrate under the excitation of the acoustic wave generated with a piezoelectric transducer at its corresponding resonant frequency. When one group of sharp-edge structures vibrates, the microfluid flows from left to right. When the other group of sharp-edge structures vibrates, the microfluid flows in the opposite direction. Some gaps are designed between the sharp-edge structures and the upper surface and the bottom surface of the microchannels, which can reduce the damping between the sharp-edge structures and the microchannels. Actuated with an acoustic wave of a different frequency, the microfluid in the microchannel can be driven bidirectionally by the inclined sharp-edge structures. The experiments show that the acoustic micropump, driven by oscillating sharp-edge structures, can produce a stable flow rate of up to 125 μm/s from left to right, when the transducer was activated at 20.0 kHz. When the transducer was activated at 12.8 kHz, the acoustic micropump can produce a stable flow rate of up to 85 μm/s from right to left. This bi-directional acoustic micropump, driven by oscillating sharp-edge structures, is easy to operate and shows great potential in various applications.