Beyond Snap-In: A Hybrid Nonlinear Control Approach for Actuators Possessing a Square-Law Characteristic

Abstract

The undesired square-law characteristics in micro-electrostatic actuators and magnetic solenoids results in a limited stable range, which reduces their application fields and performance. This research investigated the isomorphic dynamics in these actuators and observed that the nonlinear drive force and the uncertain time delay are the challenges for the full range position controller design. A hybrid nonlinear control scheme includes an input–output linearization controller and a feedback posicast compensator for targeting these problems with abundant stability margin. The experimental results show that the stable range has been extended from 33% to 80%. Furthermore, it is the first literature report of this type of actuator that can track sinusoidal motion beyond the conventional stable range with an amplitude of 70% of the total range. This contribution can significantly enhance the performance of micro-sensors or expand the usage of electrostatic/magnetic actuators in motion-control systems.