LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling-Reference-Cited by-同舟云学术

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Published:2023-07-05 Issue:13 Volume:12 Page:2964
ISSN:2079-9292
Container-title:Electronics
language:en
Short-container-title:Electronics

Author:

Huang Shitian¹,Shuai Yao¹²,Lv Lu¹,Wei Zijie¹,Fan Wei¹,Wang Yuedong¹,Zhu Dailei¹,Pan Xinqiang¹²,Luo Wenbo¹²,Wu Chuangui¹²,Zhang Wanli¹²

Affiliation:

1. School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China

2. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

Abstract

This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor.

Funder

National Key Research and Development Program of China

Nation Natural Foundation of China

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Computer Networks and Communications,Hardware and Architecture,Signal Processing,Control and Systems Engineering

Link

https://www.mdpi.com/2079-9292/12/13/2964/pdf

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