1. School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China (UESTC), Chengdu 611731, China
2. Institute of Guizhou Aerospace Measuring and Testing Technology, Guiyang 550009, China
3. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China (UESTC), Chengdu 611731, China
4. Chongqing Institute of Microelectronics Industry Technology, University of Electronic Science and Technology of China (UESTC), Chongqing 401331, China
5. Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China (UESTC), Shenzhen 518110, China