1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Intelligent Science and Technology, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
4. Academy of Advanced Semiconductors and Intelligence Technologies, Haining 314400, China