Highly Sensitive Signal Processing Devices for Capacitive Transducers of Micromechanical Accelerometers

Abstract

In this paper, the principles of the open-loop frequency-based signal processing devices for capacitive MEMS accelerometers are used to develop three CMOS IP-core (Intellectual Property core) projects of highly sensitive signal processing devices with frequency output. Signal processing devices designed in accordance with the considered method form an output of rectangular pulses whose frequencies equal a difference of signal frequencies from two identical generators with micromechanical accelerometer capacitive transducers in their frequency control circuits. First, the analog project scheme uses two harmonic LC oscillators and an analog mixer to form an output rectangular-shape differential-frequency signal, the frequency of which is dependent on the measured acceleration. Second, the digital project is fully scalable for various CMOS-technologies due to oscillators of rectangular pulses and a digital mixer. Third, the mixed-signal project combines the advantages of the analog and digital projects. The signal processing device projects were developed, modeled and compared to comprehensively solve the problems of increasing sensitivity, dynamic range, noise immunity and resistance to destabilizing factors (e.g., to temperature changes).