Full-Range Static Method of Calibration for Laser Tracker

Author:

Hu Chang’an12ORCID,Lv Fei3,Xue Liang1,Li Jiangang1,Zhong Xiaoyin4,Xu Yue5

Affiliation:

1. National Institute of Measurement and Testing Technology, Chengdu 610021, China

2. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China

3. School of Computer Science, Chengdu Normal University, Chengdu 611130, China

4. Institute of Optics, National Institute of Measurement and Testing Technology, Chengdu 610021, China

5. School of Automation, Northwestern Polytechnical University, Xi’an 710129, China

Abstract

This paper focuses on the challenge of the inability to accurately calibrate the static measurement of a laser tracker across the full scale. To address this issue, this paper proposes to add a hollow corner cube prism on a 50 m high-precision composite guide rail to achieve a double-range measurement of the laser tracker. Data analysis indicated that, in the 77 m identical-directional double-range measurement experiment, the maximum indication error of a single-beam laser interferometer was −29.5 μm, and that of a triple-beam laser interferometer was 14.6 μm, and the measurement indication error was obviously small when the Abbe error was eliminated. The single-point repeatability of the tracker was 0.9 μm. In the 50 m identical-directional verification experiment, the results of the direct measurement outperformed those of the double-range measurement, and the indication errors under standard conditions were −4.0 μm and −8.9 μm, respectively. Overall, the method used in the experiment satisfies the requirements of the laser tracker. In terms of the identical-directional measurement, the measurement uncertainty of the tracker indication error is U ≈ 1.0 μm + 0.2L (k = 2) L = (0~77 m). The proposed method also provides insights for length measurements using other high-precision measuring instruments.

Funder

National Key Research and Development Program of China

Innovation Group Project of Sichuan Province

National Natural Science Foundation of China

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Computer Networks and Communications,Hardware and Architecture,Signal Processing,Control and Systems Engineering

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3. Ma, L. (2006). Research on Large-Scale Dimensional Calibration and Its Application in Measurement Transfer Chain. [Ph.D. Thesis, Dalian University of Technology].

4. Design and Development of 80 Meters Laser Interferometric Measurement Standard Device;Miao;Ninth Int. Symp. Precis. Eng. Meas. Instrum.,2015

5. A Study on Dynamic Character of Laser Tracker;Wang;Acta Metrol. Sin.,2007

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