Fabrication and Characterization of Three-Dimensional Microelectromechanical System Coaxial Socket Device for Semiconductor Package Testing
Author:
Kim Tae-Kyun12ORCID, Yook Jong-Gwan1ORCID, Kim Joo-Yong2, Cho Yong-Ho2, Lee Uh-Hyeon2
Affiliation:
1. Department of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea 2. PMT (Protec MEMS Technology) Inc., Asan-si 31413, Republic of Korea
Abstract
With the continuous reduction in size and increase in density of semiconductor devices, there is a growing demand for contact solutions that enable high-speed testing in automotive, 5G, and artificial intelligence-based devices. Although existing solutions, such as spring pins and rubber sockets, have been effective in various applications, there is still a need for new solutions that accommodate fine-pitch, high-speed, and high-density requirements. This study proposes a novel three-dimensional microelectromechanical system spring structure coaxial socket for semiconductor chip package testing. The socket design incorporates impedance matching for high-speed testing and addresses the challenges of fine-pitch and high-density applications. Mechanical tests are conducted to evaluate the durability of the structure and electrical tests are performed to verify electrical characteristics by utilizing a vector network analyzer up to 60 GHz. Our results have revealed promising performance and will help in further optimizing the design for potential production in the field and industry.
Funder
Ministry of Trade, Industry and Energy
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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