Abstract
This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on β -phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was developed to pattern the electrodes for the device, which enabled the device to retain the piezoelectric properties of the β -phase PVDF film. Results showed that the β-phase PVDF FBARs had a resonant frequency round 9.212 MHz with a high electromechanical coupling coefficient ( k 2 ) of 12.76% ± 0.56%. The device performed well over a wide bending-strain range up to 2400 μ ε owing to its excellent flexibility. It showed good stability as a strain sensor with a sensitivity of 80 Hz / μ ε , and no visible deterioration was observed after cyclic bending tests. The PVDF FBAR also exhibited an exceptionally large temperature coefficient of frequency (TCF) of −4630 ppm / K , two orders of magnitude larger than those of other FBARs based on common inorganic piezoelectric materials, extraordinarily high sensitivity for temperature sensing. All results showed that β -phase PVDF FBARs have the potential to expand the application scope for future flexible electronics.
Funder
Zhejiang Lab
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
12 articles.
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