Detailed Study of the Correlation between Cross-Linking of Thick SU-8 and UV–NIR Optical Transmission/Photoluminescence Spectroscopy

Abstract

SU-8 polymers are promising materials for various applications due to their low cost, excellent thermal stability, and outstanding mechanical properties. Cross-linking of SU-8 is a crucial process that determines the properties of the materials. This study investigates the effect of cross-linking of free-standing SU-8 films on optical transmission and PL emission under various curing conditions. Our findings show that an increase in the cross-linking density reduces optical transmission and causes a red shift of the PL emission band peaks. By directly measuring the optical response of the isolated SU-8, we remove any uncertainty due to the substrate’s presence. Moreover, we show that optical transmission and PL spectroscopy are two non-distractive techniques that can be employed to monitor the curing of the SU-8. This finding enhances our understanding of the cross-linking process in SU-8 and paves the way to further enhance the properties of the SU-8 polymer for various electronics and optoelectronics applications.