1. School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, China
2. The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, Xi’an 710049, China
3. State Key Laboratory of Solidification Processing, Key Laboratory of Radiation Detection Materials and Devices, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an 710072, China
4. Shaanxi Advanced Semiconductor Technology Center Co., Ltd, Xi’an 710077, China