Evolution of Micro-Nano Energy Harvesting Technology—Scavenging Energy from Diverse Sources towards Self-Sustained Micro/Nano Systems

Abstract

Facing the energy consumption of a huge number of distributed wireless Internet of Things (IoT) sensor nodes, scavenging energy from the ambient environment to power these devices is considered to be a promising method. Moreover, abundant energy sources of various types are widely distributed in the surrounding environment, which can be converted into electrical energy by micro-nano energy harvesters based on different mechanisms. In this review paper, we briefly introduce the development of different energy harvesters according to the classification of target energy sources, including microscale and nanoscale energy harvesters for vibrational energy sources, microscale energy harvesters for non-vibrational energy sources, and micro-nano energy harvesters for hybrid energy sources. Furthermore, the current advances and future prospects of the applications of micro-nano energy harvesters in event-based IoT systems and self-sustained systems are discussed.