Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors

Author:

Wang Yucai,Chodavarapu Vamsy

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference20 articles.

1. MEMS Mechanical Sensors;Beeby,2004

2. Revolution of Sensors in Micro-Electromechanical Systems

3. Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage;Wise;Sens. Actuators A Phys.,2007

4. Capatitance to digital convertershttp://www.analog.com/en/analog-to-digital-converters/capacitance-to-digital-converters/products/index.html#Capacitive_to_Digital_Converters

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