Fabrication of Large-Area Micro-Hexagonal Cube Corner Retroreflectors on Three-Linear-Axis Ultraprecision Lathes

Author:

Xia Senbin12,Yin Ziqiang12,Huang Cheng1,Meng Songtao2

Affiliation:

1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China

2. Guangdong Provincial Key Laboratory for Micro-Nano Manufacturing Technology and Equipment, School of Electro-Mechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China

Abstract

Hexagonal cube corner retroreflectors (HCCRs) are the micro-optics arrays with the highest reflectivity. However, these are composed of prismatic micro-cavities with sharp edges, and conventional diamond cutting is considered unmachinable. Besides, 3-linear-axis ultraprecision lathes were considered unfeasible to fabricate HCCRs due to the lack of a rotation axis. Therefore, a new machining method is proposed as a viable option to manufacture HCCRs on the 3-linear-axis ultraprecision lathes in this paper. For the mass production of HCCRs, the dedicated diamond tool is designed and optimized. The toolpaths are proposed and optimized to further increase tool life and machining efficiency. The Diamond Shifting Cutting (DSC) method is analyzed in-depth both theoretically and experimentally. By using the optimized methods, the large-area HCCRs with a structure size of 300 µm covering an area of 10 × 12 mm2 are successfully machined on 3-linear-axis ultraprecision lathes. The experimental results show that the whole array is highly uniform, and the surface roughness Sa of three cube corner facets is all less than 10 nm. More importantly, the machining time is reduced to 19 h, which is far less than the previous processing methods (95 h). This work will significantly reduce the production threshold and costs, which is important to promote the industrial application of HCCRs.

Funder

Science and Technology Program of Guangzhou

Science and Technology Innovation Program of Hunan Province

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Reference23 articles.

1. Manufacturing and measurement of freeform optics;Fang;CIRP Ann.—Manuf. Technol.,2013

2. Precision tool setting for fabrication of a microstructure array;Gao;CIRP Ann.—Manuf. Technol.,2013

3. Fabrication of Large-area Micro-lens Array with Fast Tool Control;Noh;Int. J. Precis. Eng. Manuf.,2008

4. Nanoimprinted diffraction gratings for crystalline silicon solar cells: Implementation, characterization and simulation;Mellor;Opt. Express.,2013

5. Anisotropic etching of RuO2, and Ru with high aspect ratio for gigabit dynamic random-access memory;Yunogami;Vac. Sci. Technol. B,2000

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