Full Factorial Design (2k) for 45 Degree of Wall Angle in Anisotropic Wet Etching Process
-
Published:2019-06-26
Issue:3
Volume:14
Page:
-
ISSN:0973-8975
-
Container-title:JOURNAL OF MECHANICS OF CONTINUA AND MATHEMATICAL SCIENCES
-
language:
-
Short-container-title:JMCMS
Author:
Kaeochotchuangkul Alonggot Limcharoen
Publisher
Journal of Mechanics of Continua and Mathematical Sciences