Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond-Reference-Cited by-同舟云学术

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Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond

Published:2020 Issue:7/8/9/10 Volume:17 Page:583
ISSN:1475-7435
Container-title:International Journal of Nanotechnology
language:en
Short-container-title:IJNT

Author:

Jonker Dirk,Kooijman Lucas,Pordeli Yasser,Wel Bernhard Van Der,Berenschot Erwin,Borgelink Bjorn,The Hai Le,Boer Meint De,Eijkel Jan,Hueting Ray,Tiggelaar Roald,Houselt Arie Van,Gardeniers Han,Tas Niels

Publisher

Inderscience Publishers

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Bioengineering

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Exploring the surface-enhanced Raman scattering (SERS) activity of gold nanostructures embedded around nanogaps at wafer scale: Simulations and experiments;Applied Materials Today;2023-12

2. Low-Variance Surface-Enhanced Raman Spectroscopy Using Confined Gold Nanoparticles over Silicon Nanocones;ACS Applied Nano Materials;2023-05-20

3. Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones;Nanoscale Research Letters;2022-10-16

4. A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

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