Material aspects for the diamond machining of submicron optical structures for UV-application
Author:
Publisher
Inderscience Publishers
Subject
Industrial and Manufacturing Engineering
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ultra-Precision Machining: Cutting With Diamond Tools;Journal of Manufacturing Science and Engineering;2020-10-05
2. Material Impact on Diamond Machining of Diffractive Optical Structures for UV-Application;Journal of Manufacturing and Materials Processing;2018-03-01
3. Review on fast tool servo machining of optical freeform surfaces;The International Journal of Advanced Manufacturing Technology;2017-11-18
4. Process chains for high-precision components with micro-scale features;CIRP Annals;2016
5. Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms;Production Engineering;2013-08-01
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