Investigation of polishing parameters and slurry composition on germanium chemical mechanical planarisation using response surface methodology
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Published:2021
Issue:4
Volume:62
Page:263
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ISSN:0268-1900
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Container-title:International Journal of Materials and Product Technology
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language:en
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Short-container-title:IJMPT
Author:
Gupta Apeksha,Shathiri Karthik,Shilapuram Vidyasagar,Ramachandran Manivannan
Publisher
Inderscience Publishers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,Safety, Risk, Reliability and Quality