Influence of potassium hydroxide molarity and etching time on etching of Al-rich aluminium gallium nitride layer
-
Published:2022
Issue:2/3/4/5
Volume:19
Page:356
-
ISSN:1475-7435
-
Container-title:International Journal of Nanotechnology
-
language:en
-
Short-container-title:IJNT
Author:
Yusuf Y.,Samsudin M.E.A.,Taib M. Ikram Md,Zainal N.,Tang W.K.
Publisher
Inderscience Publishers
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Bioengineering