Novel prism designs for solid immersion optical lithography in the ultra high-NA regime
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Published:2018
Issue:8/9/10
Volume:15
Page:714
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ISSN:1475-7435
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Container-title:International Journal of Nanotechnology
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language:en
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Short-container-title:IJNT
Author:
Lowrey Sam,Blaikie Richard
Publisher
Inderscience Publishers
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Bioengineering