Simulation of the transport of atoms in a facing targets sputtering system
-
Published:2008
Issue:6
Volume:2
Page:488
-
ISSN:1749-785X
-
Container-title:International Journal of Surface Science and Engineering
-
language:en
-
Short-container-title:IJSURFSE
Author:
Settaouti A.,Settaouti L.
Publisher
Inderscience Publishers
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering