1. Associate Professor, College of Environmental and Chemical Engineering, Shanghai Univ., Shanghai 200444, and Key Laboratory of Solid Waste Treatment and Resource Recycle, Ministry of Education, People’s Republic of China (corresponding author).
2. Student, College of Environmental and Chemical Engineering, Shanghai Univ., Shanghai 200444, People’s Republic of China.
3. Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai 201203, People’s Republic of China.
4. Associate Professor, Institute of Microelectronics, Peking Univ., Beijing 100871, People’s Republic of China.