Enhanced azeotropic C2ClF5/C3F8 separation by TMA+ exchanged MFI zeolites for ultrapure fluorine electronic gas

Author:

Zhou Xiaoying1,Wu Ying1,Liu Zewei1,Wang Xingjie1,Yang Cuiting1,Yu Jian1,Xiao Jing1ORCID

Affiliation:

1. Key Laboratory of Enhanced Heat Transfer and Energy Conservation of Ministry of Education, Department of Chemistry and Chemical Engineering South China University of Technology Guangzhou China

Abstract

AbstractThe demand for the azeotropic C2ClF5/C3F8 separation continues to rise owing to the significance of ultrapure fluoride gases for the electronic industry. With a boiling point differential of 1.1 K, separating an azeotropic mixture of C2ClF5/C3F8 through sorption‐based processes under ambient conditions is a preferable alternative to the current energy‐intensive cryogenic separation method. Here, we report the highly efficient C2ClF5/C3F8 adsorption separation in quaternary alkylammonium ions modified MFI type zeolites with interlaced channels which provide a cooperative effect conferred by specific interaction sites and optimal pore size. A path‐regulatory mechanism was proposed, whereby TMA+ cations located at intersections resembling “train turnouts” force gas molecules to switch traffic channels to confined sinusoidal channels affecting the C2ClF5/C3F8 recognition sites and diffusion behavior. Molecular simulations were conducted to reveal the separation mechanism, and the breakthrough experiment validated the effectiveness of this adsorbent at 298 K outperforming conventional adsorbents for the challenging azeotropic separation.

Funder

National Natural Science Foundation of China

Basic and Applied Basic Research Foundation of Guangdong Province

Publisher

Wiley

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