Surface effects on the diagnostic of carbon/nitrogen low-pressure plasmas studied by differentially pumped mass spectrometry
Author:
Affiliation:
1. Laboratorio Nacional de Fusion; CIEMAT; Avd Complutense 40 E-28040 Madrid Spain
Publisher
Wiley
Subject
Spectroscopy
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/jms.3346/fullpdf
Reference39 articles.
1. S.M. Leeds Characterisation of the Gas-Phase Environment in a Microwave Plasma Enhanced Diamond Chemical Vapour Deposition Reactor using Molecular Beam Mass Spectrometry PhD thesis 1999
2. Destruction of methane in low-pressure, electrodeless radio frequency plasma on quartz walls;Mozetic;J. Appl. Phys.,2011
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