Removal of Ar+ beam-induced damaged layers from polyimide surfaces with argon gas cluster ion beams-Reference-Cited by-同舟云学术

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Removal of Ar+ beam-induced damaged layers from polyimide surfaces with argon gas cluster ion beams

Published:2010-07-26 Issue:9 Volume:42 Page:1453-1457
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Miyayama Takuya,Sanada Noriaki,Bryan Scott R.,Hammond John S.,Suzuki Mineharu

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.3675/fullpdf

Reference28 articles.

1. Ion-beam-induced migration and its effect on concentration profiles

2. Secondary ion mass spectrometry using cluster primary ion beams

3. Molecular secondary ion formation under cluster bombardment: A fundamental review

4. Molecular Depth Profiling with Cluster Ion Beams

5. Precise XPS depth profile of soda-lime-silica glass using C60 ion beam

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