1. Karlsruhe Institute of Technology, Institute of Microstructure Technology; Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen Germany
2. University of Freiburg; Department of Microsystems Engineering (IMTEK), Laboratory for Microactuators; Georges-Koehler-Allee 102 79110 Freiburg Germany
3. Bruker BioSpin GmbH; Silberstreifen 4 76287 Rheinstetten Germany