X‐Ray Masks for LIGA Microfabrication-Reference-Cited by-同舟云学术

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X‐Ray Masks for LIGA Microfabrication

Published:2008-11-26 Issue: Volume: Page:11-50
ISSN:1865-3715
Container-title:LIGA and Its Applications
language:
Short-container-title:

Author:

Desta Yohannes,Goettert Jost

Publisher

Wiley

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/9783527622573.ch2

Reference121 articles.

1. Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

2. Fabrication of sub-30 nm masks for x-ray nanolithography

3. High-Precision X-Ray Mask Technology

4. Ti- and Be-X-ray masks with alignment windows for the LIGA process

5. Fabrication of graphite masks for deep and ultradeep X‐ray lithography;Desta Y.M.;Proceedings of the SPIE–The International Society for Optical Engineering,2000

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reflective x-ray masks for x-ray lithography;Journal of Micromechanics and Microengineering;2024-03-14

2. Micro and Nano Machining—An Industrial Perspective;Micro and Nano Machining of Engineering Materials;2018-09-27

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