Electrothermal Excitation of Resonant MEMS

Author:

Brand Oliver,Pourkamali Siavash

Publisher

Wiley-VCH Verlag GmbH & Co. KGaA

Reference35 articles.

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2. I-shaped thermally actuated VHF resonators with submicron components;Hall;Sens. Actuators, A,2013

3. High-frequency thermally actuated electromechanical resonators with piezoresistive readout;Rahafrooz;IEEE Trans. Electron Devices,2011

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