Author:
Molarius Jyrki,Riekkinen Tommi,Kulawski Martin,Ylilammi Markku
Publisher
Wiley-VCH Verlag GmbH & Co. KGaA
Reference78 articles.
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2. Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators;Bjurström;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2006
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1 articles.
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