Different Ways to Overcome the Resolution Problem in Optical Micro and Nano Metrology-Reference-Cited by-同舟云学术

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Different Ways to Overcome the Resolution Problem in Optical Micro and Nano Metrology

Published:2012-08-23 Issue: Volume: Page:327-368
ISSN:
Container-title:Optical Imaging and Metrology
language:
Short-container-title:

Author:

Osten Wolfgang

Publisher

Wiley-VCH Verlag GmbH & Co. KGaA

Reference127 articles.

1. SEMATECH 1982 http://www.itrs.net/Links/2011ITRS/Home2011.htm

2. Inverse Problems;Keller;Am. Math. Mon,1976

3. Introduction to Inverse Problems in Imaging

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