Combination of Semiconductor Parameter Analyzer and Conductive Atomic Force Microscope for Advanced Nanoelectronic Characterization-Reference-Cited by-同舟云学术

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Combination of Semiconductor Parameter Analyzer and Conductive Atomic Force Microscope for Advanced Nanoelectronic Characterization

Published:2017-08-16 Issue: Volume: Page:225-241
ISSN:
Container-title:Conductive Atomic Force Microscopy
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Author:

Iglesias Vanessa¹,Jing Xu¹²,Lanza Mario²

Affiliation:

1. International Iberian Nanotechnology Laboratory; Av. Mestre José Veiga 4715-330 Braga Portugal

2. Soochow University; Collaborative Innovation Center of Suzhou Nanoscience and Technology, Institute of Functional Nano & Soft Materials (FUNSOM); 199 Ren-Ai Road Suzhou 215123 China

Publisher

Wiley-VCH Verlag GmbH & Co. KGaA

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/9783527699773.ch10/fullpdf

Reference45 articles.

1. Edgar , L. J. 1925 1, 745, 175

2. Cramming more components onto integrated circuits;Moore;Proc. IEEE,1965

3. Stathis , J. H. DiMaria , D. J. 1998 IEEE International Electron Devices Meeting 167 170

4. Huard , V. Parthasarathy , C. R. Bravaix , A. Guerin , C. Pion , E. 2009 Proceedings of IEEE International Reliability Physics Symposium (IRPS) 624 633

5. Rodríguez , R. 2000 Analisis de la degradación y ruptura dieléctrica de capas finas de SiO 2 en dispositivos MOS sometidos a estresses estáticos y dinámicos

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