Author:
Jung M. Y. L.,Gunawan R.,Braatz R. D.,Seebauer E. G.
Subject
General Chemical Engineering,Environmental Engineering,Biotechnology
Reference53 articles.
1. eds. Silicon Front-End Processing - Physics & Technology of Dopant-Defect Interactions II. Warrendale, PA: Materials Research Society; 2000; No. 610.
2. Energetics and diffusivity of atomic boron in silicon by density-functional-based tight-binding simulations
3. Atomic-scale characterization of boron diffusion in silicon
4. Nonlinear Parameter Estimation. New York: Academic Press; 1974.
5. Parameter Estimation in Engineering and Science. New York: Wiley; 1977.
Cited by
26 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献